XYZ stage for vacuum prober
Dimensions
☆ Height: about 116mm (handle position by)
☆ width: about 121mm (by the handle position)
☆ Depth: about 167mm (by the handle position)
Stage movement amount
☆ X-axis: ± 25.0㎜ (chamber center direction)
☆ Y-axis: ± 15.0㎜ (horizontal direction)
☆ Z-axis: ± 12.5㎜ (vertical direction)
Please contact us for more details.
E-mail:info@axj.co.jp